Ion-Sources: Multi-Cell and Linear Ion-Beam Sources
AE's line of Multi-Cell Ion Sources and Linear Ion brings you industrial, low maintenance, high yield functions-with process performance, quality, and cost of ownership benefits that other technologies can't match
Advanced Energy Industries, Inc.f Multi-Cell Ion Sources and Linear Ion brings you industrial, low maintenance, high yield functions-with process performance, quality, and cost of ownership benefits that other technologies can't match. No filaments or hollow cathodes. No grids or ion optics. Reactive gas compatible. Industrial, low maintenance design. Field proven dc power supply. Easily retrofittable.Direct deposition of thin films (e.g., DLC using hydrocarbon based gases)
In-situ ion beam pre-cleaning in a static processing system
Ion beam assisted deposition (i.e., surface modification during deposition and post deposited film modification)
Ion beam etching
<%=company%>, 1625 Sharp Point Drive. Fort Collins, CO 80525. TEL: 970-221-4670; FAX: 970-221-5583.